A few months ago, I wrote an article on how to use All Check to capture worship attendance. Having everyone in the family check in to everything at once including worship is really helpful. That article answers the questions: why take individual attendance, how to do it, and how to motivate people to respond. Check it out if you're interested.
Another one of our creative churches uses their digital connection card to take individual worship attendance for their multiple services. On their connection card they have a "Service I'm attending" dropdown question with all their services listed including online.